Industry: Chemical & Material
Published Date: 2026-03-09
Pages: 75 Pages
Report ld: 6063140
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EUV Pellicle Market Size(US$)

CAGR 2026-2032
8.6%
Market Size,2032
USD 184
Million
Market Snapshot
Source: Secondary research, interviews with experts, and QYResearch analysis
The global EUV Pellicle market size was US$ 104 million in 2025 and is forecast to reach a readjusted size of US$ 184 million by 2032 with a CAGR of 8.6% during the forecast period 2026-2032.
In a typical semiconductor process, a thin protective film is usually placed on the surface of the photomask to protect it from contaminants. This thin film, called a pellicle, prevents undesirable conditions or defects in the wafer circuit pattern, thereby protecting the IC chip from potential damage. In addition, the mask protective film is also a consumable that needs to be replaced regularly, and because the light source wavelength of EUV lithography equipment is shorter, the protective film needs to be thinner to increase light transmittance.
Initially, the film was a single-layer structure with a core layer made of polysilicon. Since 2021, EUV pellicle have adopted composite materials. Its key components now consist of alternating molybdenum disilicide (MoSi₂) and silicon (Si) layers to form a multi-layer structure. EUV transmittance (EUVT) is a key performance indicator of EUV pellicle. The transition from a single-layer structure to a multi-layer structure has increased EUVT from about 82% to about 90%. The next generation of film technology will go beyond structural changes (from single-layer to multi-layer) and introduce material advances, leading to the emergence of CNT pellicle.
Driven by advances in artificial intelligence (AI) and computing technology, the semiconductor industry's demand for advanced chips continues to grow, with the fastest growth in chips below 7nm manufactured using EUV technology. In advanced processes of 7nm and below, the pattern size on the mask may be only tens of nanometers, which places extremely strict requirements on the uniformity and defect control of the Pellicle. The next generation of high-power EUV lithography machines operates at more than 500W, and EUV films are needed to protect the photomask from particle contamination during chip production.
In recent years, the phenomenon of chipmakers adopting extreme ultraviolet (EUV) processes in their advanced chip manufacturing is rapidly increasing. To meet this growing demand, many companies are developing protective films for EUV processes.
ASML launched its first EUV pellicle in 2019 and licensed the technology to Mitsui Chemicals, which began mass sales in 2021. Since then, ASML has made improvements to its pellicle. It is reported that Mitsui Chemicals' next-generation CNT pellicle production facility will be completed by the end of 2025.
In 2021, South Korean company S&S Tech developed a pellicle with a transmittance of more than 90%. FST's EUV pellicle is still in the development stage.
Canatu has been working with Imec since 2015 to develop CNT pellicle to meet performance targets such as life and transmittance, thermal durability, permeability and strength.
The global EUV Pellicle market is strategically segmented by company, region (country), by Type, and by Application. This report empowers stakeholders to capitalize on emerging opportunities, optimize product strategies, and outperform competitors through data-driven insights on sales, revenue, and forecasts across regions, by Type, and by Application for 2021-2032.
MARKET SEGMENTATION
CHAPTER OUTLINE
Chapter 1: Report scope, segment-level executive summary (by Type, by Application) and market evolution across the short, mid and long term
Chapter 2: Quantitative analysis of EUV Pellicle sales and revenue at global, regional, and country levels, highlighting market size and growth potential by region
Chapter 3: Competitive landscape of EUV Pellicle manufacturers (sales, revenue, pricing, market share, industry rankings, and M&A / expansion plans)
Chapter 4: by Type-based segmentation analysis (sales, revenue, pricing, and growth potential) to identify blue-ocean product segments
Chapter 5: by Application-based segmentation analysis (sales, revenue, pricing, and growth potential) to uncover high-value downstream markets
Chapter 6: Regional breakdown by company, customer, by Type and by Application (sales, revenue, and pricing for each segment)
Chapter 7: Key manufacturer profiles –company overview, EUV Pellicle product descriptions and specifications, revenue, gross margins, and recent developments
Chapter 8: Industry chain analysis – upstream raw materials, manufacturing links, and downstream application sectors
Chapter 9: Sales channels and distributor analysis – routes to market and key customer interfaces
Chapter 10: Market dynamics – trends, drivers, restraints, risks for manufacturers, and the impact of relevant industry policies
Chapter 11: Key findings, main takeaways, and overall conclusions of the report.
WHY THIS REPORT
Beyond standard market data, this analysis provides a clear profitability roadmap, empowering you to:
Unlike generic global market reports, this study combines macro-level industry trends with hyper-local operational intelligence, empowering data-driven decisions across the EUV Pellicle value chain, addressing:
- Market entry risks/opportunities by region
- Product mix optimization based on local practices
- Competitor tactics in fragmented vs. consolidated markets
QYRESEARCH'S STRENGTHS
Unlike generic global market reports, this study combines macro-level industry trends with hyper-local operational intelligence, empowering data-driven decisions across the Compound Chocolate value chain, addressing:
We identify regional market threats and growth prospects to guide your overseas layout.
We adjust product portfolios in line with local consumption habits.
We unpack rivals’ operation strategies for scattered and highly concentrated industries.
We cover competition landscape, full supply chain and quantified market size data, and deliver tailor-made customized surveys to meet your unique business demands.
We own self-owned massive exclusive databases, backed by 19 years of global market research experience across thousands of sectors.
Our team operates 24 hours a day, 365 days a year, enabling ultra-fast report turnaround to respond to your research needs efficiently.
We integrate regional risk assessment, localized product optimization and competitor analysis to deliver actionable market strategies.
All data is cross-verified from multiple industry sources to deliver thorough, precise analysis that supports reliable corporate strategic decisions.
We provide responsive, dedicated after-sales support to resolve all follow-up inquiries about reports, data and industry interpretation.
TABLE OF CONTENTS
1 Market Overview
1.1 EUV Pellicle Product Scope
1.2 EUV Pellicle by Type
1.2.1 Global EUV Pellicle Sales by Type (2021, 2025 & 2032)
1.2.2 ≥90% transmittance
1.2.3 <90% transmittance
1.3 EUV Pellicle by Application
1.3.1 Global EUV Pellicle Sales Comparison by Application (2021, 2025 & 2032)
1.3.2 IDM
1.3.3 Foundry
1.4 Global EUV Pellicle Market Estimates and Forecasts (2021-2032)
1.4.1 Global EUV Pellicle Market Size (Value) and Growth Rate (2021-2032)
1.4.2 Global EUV Pellicle Market Size (Volume) and Growth Rate (2021-2032)
1.4.3 Global EUV Pellicle Price Trends (2021-2032)
1.5 Assumptions and Limitations
2 Market Size and Prospects by Region
2.1 Global EUV Pellicle Market Size by Region: 2021 VS 2025 VS 2032
2.2 Global EUV Pellicle Historical Market Scenario by Region (2021-2026)
2.2.1 Global EUV Pellicle Sales Market Share by Region (2021-2026)
2.2.2 Global EUV Pellicle Revenue Market Share by Region (2021-2026)
2.3 Global EUV Pellicle Market Estimates and Forecasts by Region (2027-2032)
2.3.1 Global EUV Pellicle Sales Estimates and Forecasts by Region (2027-2032)
2.3.2 Global EUV Pellicle Revenue Forecast by Region (2027-2032)
2.4 Major Regions and Emerging Market Analysis
2.4.1 Europe EUV Pellicle Market Size and Prospects (2021-2032)
2.4.2 Japan EUV Pellicle Market Size and Prospects (2021-2032)
2.4.3 South Korea EUV Pellicle Market Size and Prospects (2021-2032)
2.4.4 China Taiwan EUV Pellicle Market Size and Prospects (2021-2032)
3 Global Market Size by Type
3.1 Global EUV Pellicle Historical Market Review by Type (2021-2026)
3.1.1 Global EUV Pellicle Sales by Type (2021-2026)
3.1.2 Global EUV Pellicle Revenue by Type (2021-2026)
3.1.3 Global EUV Pellicle Average Price by Type (2021-2026)
3.2 Global EUV Pellicle Market Estimates and Forecasts by Type (2027-2032)
3.2.1 Global EUV Pellicle Sales Forecast by Type (2027-2032)
3.2.2 Global EUV Pellicle Revenue Forecast by Type (2027-2032)
3.2.3 Global EUV Pellicle Price Forecast by Type (2027-2032)
3.3 Representative Players for Different Types of EUV Pellicle
4 Global Market Size by Application
4.1 Global EUV Pellicle Historical Market Review by Application (2021-2026)
4.1.1 Global EUV Pellicle Sales by Application (2021-2026)
4.1.2 Global EUV Pellicle Revenue by Application (2021-2026)
4.1.3 Global EUV Pellicle Average Price by Application (2021-2026)
4.2 Global EUV Pellicle Market Estimates and Forecasts by Application (2027-2032)
4.2.1 Global EUV Pellicle Sales Forecast by Application (2027-2032)
4.2.2 Global EUV Pellicle Revenue Forecast by Application (2027-2032)
4.2.3 Global EUV Pellicle Price Forecast by Application (2027-2032)
4.3 New Sources of Growth in EUV Pellicle Applications
5 Competition Landscape by Players
5.1 Global EUV Pellicle Sales by Player (2021-2026)
5.2 Global Top EUV Pellicle Players by Revenue (2021-2026)
5.3 Global EUV Pellicle Market Share by Company Type (Tier 1, Tier 2, and Tier 3), based on EUV Pellicle revenue as of 2025
5.4 Global EUV Pellicle Average Price by Company (2021-2026)
5.5 Global Key Manufacturers of EUV Pellicle, Manufacturing Sites & Headquarters
5.6 Global Key Manufacturers of EUV Pellicle, Product Type & Application
5.7 Global Key Manufacturers of EUV Pellicle, Date of Entry into This Industry
5.8 Manufacturers Mergers & Acquisitions, Expansion Plans
6 Regional Analysis
6.1 Europe Market: Players, Segments, Downstream and Major Customers
6.1.1 Europe EUV Pellicle Sales by Company
6.1.1.1 Europe EUV Pellicle Sales by Company (2021-2026)
6.1.1.2 Europe EUV Pellicle Revenue by Company (2021-2026)
6.1.2 Europe EUV Pellicle Sales Breakdown by Type (2021-2026)
6.1.3 Europe EUV Pellicle Sales Breakdown by Application (2021-2026)
6.1.4 Europe EUV Pellicle Major Customers
6.1.5 Europe Market Trends and Opportunities
6.2 Japan Market: Players, Segments, Downstream and Major Customers
6.2.1 Japan EUV Pellicle Sales by Company
6.2.1.1 Japan EUV Pellicle Sales by Company (2021-2026)
6.2.1.2 Japan EUV Pellicle Revenue by Company (2021-2026)
6.2.2 Japan EUV Pellicle Sales Breakdown by Type (2021-2026)
6.2.3 Japan EUV Pellicle Sales Breakdown by Application (2021-2026)
6.2.4 Japan EUV Pellicle Major Customers
6.2.5 Japan Market Trends and Opportunities
6.3 South Korea Market: Players, Segments, Downstream and Major Customers
6.3.1 South Korea EUV Pellicle Sales by Company
6.3.1.1 South Korea EUV Pellicle Sales by Company (2021-2026)
6.3.1.2 South Korea EUV Pellicle Revenue by Company (2021-2026)
6.3.2 South Korea EUV Pellicle Sales Breakdown by Type (2021-2026)
6.3.3 South Korea EUV Pellicle Sales Breakdown by Application (2021-2026)
6.3.4 South Korea EUV Pellicle Major Customers
6.3.5 South Korea Market Trends and Opportunities
6.4 China Taiwan Market: Players, Segments, Downstream and Major Customers
6.4.1 China Taiwan EUV Pellicle Sales by Company
6.4.1.1 China Taiwan EUV Pellicle Sales by Company (2021-2026)
6.4.1.2 China Taiwan EUV Pellicle Revenue by Company (2021-2026)
6.4.2 China Taiwan EUV Pellicle Sales Breakdown by Type (2021-2026)
6.4.3 China Taiwan EUV Pellicle Sales Breakdown by Application (2021-2026)
6.4.4 China Taiwan EUV Pellicle Major Customers
6.4.5 China Taiwan Market Trends and Opportunities
7 Company Profiles and Key Figures
7.1 Mitsui Chemicals
7.1.1 Mitsui Chemicals Company Information
7.1.2 Mitsui Chemicals Business Overview
7.1.3 Mitsui Chemicals EUV Pellicle Sales, Revenue and Gross Margin (2021-2026)
7.1.4 Mitsui Chemicals EUV Pellicle Products Offered
7.1.5 Mitsui Chemicals Recent Development
7.2 S&S Tech
7.2.1 S&S Tech Company Information
7.2.2 S&S Tech Business Overview
7.2.3 S&S Tech EUV Pellicle Sales, Revenue and Gross Margin (2021-2026)
7.2.4 S&S Tech EUV Pellicle Products Offered
7.2.5 S&S Tech Recent Development
7.3 Canatu
7.3.1 Canatu Company Information
7.3.2 Canatu Business Overview
7.3.3 Canatu EUV Pellicle Sales, Revenue and Gross Margin (2021-2026)
7.3.4 Canatu EUV Pellicle Products Offered
7.3.5 Canatu Recent Development
7.4 TSMC
7.4.1 TSMC Company Information
7.4.2 TSMC Business Overview
7.4.3 TSMC EUV Pellicle Sales, Revenue and Gross Margin (2021-2026)
7.4.4 TSMC EUV Pellicle Products Offered
7.4.5 TSMC Recent Development
7.5 FST
7.5.1 FST Company Information
7.5.2 FST Business Overview
7.5.3 FST EUV Pellicle Sales, Revenue and Gross Margin (2021-2026)
7.5.4 FST EUV Pellicle Products Offered
7.5.5 FST Recent Development
8 EUV Pellicle Manufacturing Cost Analysis
8.1 EUV Pellicle Key Raw Materials Analysis
8.1.1 Key Raw Materials
8.1.2 Key Suppliers of Raw Materials
8.2 Manufacturing Cost Structure
8.3 Manufacturing Process Analysis of EUV Pellicle
8.4 EUV Pellicle Industrial Chain Analysis
9 Marketing Channels, Distributors and Customers
9.1 Marketing Channels
9.2 EUV Pellicle Distributors List
9.3 EUV Pellicle Customers
10 EUV Pellicle Market Dynamics
10.1 EUV Pellicle Industry Trends
10.2 EUV Pellicle Market Drivers
10.3 EUV Pellicle Market Challenges
10.4 EUV Pellicle Market Restraints
11 Research Findings and Conclusion
12 Appendix
12.1 Research Methodology
12.1.1 Methodology/Research Approach
12.1.1.1 Research Programs/Design
12.1.1.2 Market Size Estimation
12.1.1.3 Market Breakdown and Data Triangulation
12.1.2 Data Source
12.1.2.1 Secondary Sources
12.1.2.2 Primary Sources
12.2 Author Details
12.3 Disclaimer
TABLE OF FIGURES
List of Tables
List of Figures
KEY QUESTIONS ADDRESSED BY THE REPORT
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REPORT COVERAGE
DESCRIPTION
OVERVIEW
MARKET SEGMENTATION
CHAPTER OUTLINE
WHY THIS REPORT
QYRESEARCH'S STRENGTHS
TABLE OF CONTENTS
TABLE OF FIGURES
RLEATED REPORTS
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