Industry: Chemical & Material
Published Date: 2025-04-25
Pages: 108 Pages
Report ld: 4216336
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Fluorocarbon Gases Market Size(US$)

CAGR 2025-2031
7.3%
Market Size,2031
USD 2,453
Million
Market Snapshot
Source: Secondary research, interviews with experts, and QYResearch analysis
The global Fluorocarbon Gases market size was US$ 1476 million in 2024 and is forecast to a readjusted size of US$ 2453 million by 2031 with a CAGR of 7.3% during the forecast period 2025-2031.
Fluorocarbons, sometimes referred to as perfluorocarbons or PFCs, are organofluorine compounds with the formula CxFy, i.e., they contain only carbon and fluorine. ... Compounds with the prefix perfluoro- are hydrocarbons, including those with heteroatoms, wherein all C-H bonds have been replaced by C-F bonds.
Electronics Manufacturing industries that use fluorocarbon gases for etching and chamber cleaning include liquid crystal displays (LCDs), photovoltaic cells (PV), and semiconductors (including light-emitting diodes). A range of gases are used in two important steps of electronics manufacturing:
Plasma etching silicon containing materials and cleaning chemical vapour deposition (CVD) tool chamber-walls where silicon has deposited.
The use of fluorocarbon gases in these processes is crucial to the production of devices, as there are no effective substitutes that can be utilized.
In the current global electronic gas market, fluorine-containing special gases account for 30% of the total. In the semiconductor field, according to different uses, fluorine-containing electronic special gases can be divided into fluorine-containing cleaning gases and fluorine-containing etching gases. Fluorine-containing etching gases are widely used in semiconductor processes such as thin films, etching, doping, vapor deposition and diffusion. Etching methods include wet chemical etching and dry chemical etching. Dry etching is increasingly used due to its strong etching directionality, accurate process control, convenience, no detoxification, no substrate damage and impurities. Etching is the process of etching the processed surface of the substrate that is not masked by the photoresist, such as silicon oxide film, metal film, etc., to obtain the area masked by the photoresist, so as to obtain the desired imaging pattern on the substrate surface. The basic requirements for etching are clean pattern edges, clear lines, small pattern transformation differences, and no damage and drilling erosion on the photoresist film and its mask protection surface. The main varieties of fluorine-containing etchants include tetrafluoromethane, trifluoromethane, difluoromethane, hexafluoroethane, octafluorocyclobutane, hexafluorobutadiene, etc.
The semiconductor cleaning process mainly removes particles and metal pollutants, organic matter on silicon wafers, removes resists during etching and wiring processes, removes compounds, and cleans after CMP (chemical mechanical polishing). Since the components and connections in the integrated circuit are quite fine, if they are contaminated by dust particles and metals during the component manufacturing process, it is easy to cause damage to the circuit function in the chip, forming short circuits or open circuits, etc., leading to the failure of the integrated circuit and affecting the formation of geometric features. Therefore, in addition to eliminating external pollution sources during the manufacturing process, cleaning work is required in the integrated circuit manufacturing steps such as high-temperature diffusion and before ion implantation. Fluorine-containing cleaning agents show good performance in semiconductor and electronic industry cleaning, especially dry cleaning. Fluorine-containing cleaning agents have a low boiling point and exist in the gas phase at room temperature, so they are easy to perform dry gas phase cleaning. Traditional fluorine-containing cleaning gases mainly include carbon tetrafluoride, hexafluoroethane, etc. With the continuous improvement of environmental requirements, the representative new generation of cleaner and more efficient fluorine-containing cleaning gases is difluoromethylene oxide, and others such as fluorine gas and chlorine trifluoride.
Electronics Manufacturing industries that use fluorocarbon gases for etching and chamber cleaning include liquid crystal displays (LCDs), photovoltaic cells (PV), and semiconductors (including light-emitting diodes). A range of gases are used in two important steps of electronics manufacturing:
Plasma etching silicon containing materials and cleaning chemical vapour deposition (CVD) tool chamber-walls where silicon has deposited.
Currently, the many Fluorocarbon Gas market is highly concentrated, dominated by several manufacturers, players such as SLinde Gas, Showa Denko, Taiyo Nippon Sanso, Air Liquide, Kanto Denka Kogyo, Merck, Foosung Co., Ltd., SK Materials, Huate Gas, Kemeite (Yoke Technology), Haohua, Jinhong Gas, etc, are playing important roles in Fluorocarbon Gas industry. Top 5 took up more than 75% of the global market in 2024, in terms of revenue.
The Fluorocarbon Gas market is global, with key demand centers in China, Europe, Japan, South Korea, Southeast Asia, China Taiwan and the United States. Since the Fluorocarbon Gas main end users are semiconductor and display panels, with the focus of semiconductors industry shifts to Southeast Asia, China and other Asia countries, the Asia-Pacific will have a better huge demand of Fluorocarbon Gas.
The Fluorocarbon Gas is mainly used in Integrated Circuits, Display panels, solar and LED industry. Integrated Circuits is the largest consumer group, with consumption market share of 72% in 2024. The semiconductor industry is the largest user of Fluorocarbon Gas and has the most diverse Fluorocarbon Gas requirements in terms of products, package sizes and purity requirements. The semiconductor industry uses all the different specialty gases produced. Purities are typically 4N and above and the packages can range from small cylinders to tonner/Y packages to tube trailers. The Fluorocarbon Gas market is global, with key demand centers in China, Europe, Japan, Korea, Southeast Asia, Taiwan and the United States.
The display panels community is the second largest user group for Fluorocarbon Gas. However, the breadth of Fluorocarbon Gas products used in panel fabs is much more limited than in the semiconductor industry. Fluorocarbon Gas use has grown with the development of the panels industry across both TFT-LCD segment and AMOLED segment, with many large end users in Korea, China, Taiwan, and Japan. Korea and China boast large Fluorocarbon Gas supply infrastructures geared towards serving the panels industry.
The global Fluorocarbon Gases market is strategically segmented by company, region (country), by Type, and by Application. This report empowers stakeholders to capitalize on emerging opportunities, optimize product strategies, and outperform competitors through data-driven insights on sales, revenue, and forecasts across regions, by Type, and by Application for 2020-2031.
By 2025, the evolving U.S. tariff policy is poised to inject considerable uncertainty into the global economic landscape. This report delves into the latest U.S. tariff measures and the corresponding policy responses across the globe, evaluating their impacts on Fluorocarbon Gases market competitiveness, regional economic performance, and supply chain configurations.
MARKET SEGMENTATION
CHAPTER OUTLINE
Chapter 1: Report scope, executive summary, and market evolution scenarios (short/mid/long term).
Chapter 2: Quantitative analysis of Fluorocarbon Gases market size and growth potential at global, regional, and country levels.
Chapter 3: Competitive benchmarking of manufacturers (revenue, market share, M&A, R&D focus).
Chapter 4: Type-based segmentation analysis – Uncovering blue ocean markets (e.g., Hexafluoroethane (C2F6) in China).
Chapter 5: Application-based segmentation analysis – High-growth downstream opportunities (e.g., Display Panels in India).
Chapter 6: Regional sales and revenue breakdown by company, type, application and customer.
Chapter 7: Key manufacturer profiles – Financials, product portfolios, and strategic developments.
Chapter 8: Market dynamics – Drivers, restraints, regulatory impacts, and risk mitigation strategies.
Chapter 9: Actionable conclusions and strategic recommendations.
WHY THIS REPORT
Beyond standard market data, this analysis provides a clear profitability roadmap, empowering you to:
Unlike generic global market reports, this study combines macro-level industry trends with hyper-local operational intelligence, empowering data-driven decisions across the Fluorocarbon Gases value chain, addressing:
- Market entry risks/opportunities by region
- Product mix optimization based on local practices
- Competitor tactics in fragmented vs. consolidated markets
QYRESEARCH'S STRENGTHS
Unlike generic global market reports, this study combines macro-level industry trends with hyper-local operational intelligence, empowering data-driven decisions across the Compound Chocolate value chain, addressing:
We identify regional market threats and growth prospects to guide your overseas layout.
We adjust product portfolios in line with local consumption habits.
We unpack rivals’ operation strategies for scattered and highly concentrated industries.
We cover competition landscape, full supply chain and quantified market size data, and deliver tailor-made customized surveys to meet your unique business demands.
We own self-owned massive exclusive databases, backed by 19 years of global market research experience across thousands of sectors.
Our team operates 24 hours a day, 365 days a year, enabling ultra-fast report turnaround to respond to your research needs efficiently.
We integrate regional risk assessment, localized product optimization and competitor analysis to deliver actionable market strategies.
All data is cross-verified from multiple industry sources to deliver thorough, precise analysis that supports reliable corporate strategic decisions.
We provide responsive, dedicated after-sales support to resolve all follow-up inquiries about reports, data and industry interpretation.
TABLE OF CONTENTS
1 Market Overview
1.1 Fluorocarbon Gases Product Scope
1.2 Fluorocarbon Gases by Type
1.2.1 Global Fluorocarbon Gases Sales by Type (2020 & 2024 & 2031)
1.2.2 Tetrafluoromethane (CF4)
1.2.3 Hexafluoroethane (C2F6)
1.2.4 Octafluoropropane (C3F8)
1.2.5 Hexafluorobutadiene (C4F6)
1.2.6 Octafluorocyclobutane (C4F8)
1.2.7 Tetrafluoromethane (CHF3)
1.2.8 Others
1.3 Fluorocarbon Gases by Application
1.3.1 Global Fluorocarbon Gases Sales Comparison by Application (2020 & 2024 & 2031)
1.3.2 Integrated Circuits
1.3.3 Display Panels
1.3.4 Solar
1.3.5 LED & Others
1.4 Global Fluorocarbon Gases Market Estimates and Forecasts (2020-2031)
1.4.1 Global Fluorocarbon Gases Market Size in Value Growth Rate (2020-2031)
1.4.2 Global Fluorocarbon Gases Market Size in Volume Growth Rate (2020-2031)
1.4.3 Global Fluorocarbon Gases Price Trends (2020-2031)
1.5 Assumptions and Limitations
2 Market Size and Prospective by Region
2.1 Global Fluorocarbon Gases Market Size by Region: 2020 VS 2024 VS 2031
2.2 Global Fluorocarbon Gases Retrospective Market Scenario by Region (2020-2025)
2.2.1 Global Fluorocarbon Gases Sales Market Share by Region (2020-2025)
2.2.2 Global Fluorocarbon Gases Revenue Market Share by Region (2020-2025)
2.3 Global Fluorocarbon Gases Market Estimates and Forecasts by Region (2026-2031)
2.3.1 Global Fluorocarbon Gases Sales Estimates and Forecasts by Region (2026-2031)
2.3.2 Global Fluorocarbon Gases Revenue Forecast by Region (2026-2031)
2.4 Major Region and Emerging Market Analysis
2.4.1 North America Fluorocarbon Gases Market Size and Prospective (2020-2031)
2.4.2 Europe Fluorocarbon Gases Market Size and Prospective (2020-2031)
2.4.3 China Fluorocarbon Gases Market Size and Prospective (2020-2031)
2.4.4 Japan Fluorocarbon Gases Market Size and Prospective (2020-2031)
2.4.5 South Korea Fluorocarbon Gases Market Size and Prospective (2020-2031)
3 Global Market Size by Type
3.1 Global Fluorocarbon Gases Historic Market Review by Type (2020-2025)
3.1.1 Global Fluorocarbon Gases Sales by Type (2020-2025)
3.1.2 Global Fluorocarbon Gases Revenue by Type (2020-2025)
3.1.3 Global Fluorocarbon Gases Price by Type (2020-2025)
3.2 Global Fluorocarbon Gases Market Estimates and Forecasts by Type (2026-2031)
3.2.1 Global Fluorocarbon Gases Sales Forecast by Type (2026-2031)
3.2.2 Global Fluorocarbon Gases Revenue Forecast by Type (2026-2031)
3.2.3 Global Fluorocarbon Gases Price Forecast by Type (2026-2031)
3.3 Different Types Fluorocarbon Gases Representative Players
4 Global Market Size by Application
4.1 Global Fluorocarbon Gases Historic Market Review by Application (2020-2025)
4.1.1 Global Fluorocarbon Gases Sales by Application (2020-2025)
4.1.2 Global Fluorocarbon Gases Revenue by Application (2020-2025)
4.1.3 Global Fluorocarbon Gases Price by Application (2020-2025)
4.2 Global Fluorocarbon Gases Market Estimates and Forecasts by Application (2026-2031)
4.2.1 Global Fluorocarbon Gases Sales Forecast by Application (2026-2031)
4.2.2 Global Fluorocarbon Gases Revenue Forecast by Application (2026-2031)
4.2.3 Global Fluorocarbon Gases Price Forecast by Application (2026-2031)
4.3 New Sources of Growth in Fluorocarbon Gases Application
5 Competition Landscape by Players
5.1 Global Fluorocarbon Gases Sales by Players (2020-2025)
5.2 Global Top Fluorocarbon Gases Players by Revenue (2020-2025)
5.3 Global Fluorocarbon Gases Market Share by Company Type (Tier 1, Tier 2, and Tier 3) & (based on the Revenue in Fluorocarbon Gases as of 2024)
5.4 Global Fluorocarbon Gases Average Price by Company (2020-2025)
5.5 Global Key Manufacturers of Fluorocarbon Gases, Manufacturing Sites & Headquarters
5.6 Global Key Manufacturers of Fluorocarbon Gases, Product Type & Application
5.7 Global Key Manufacturers of Fluorocarbon Gases, Date of Enter into This Industry
5.8 Manufacturers Mergers & Acquisitions, Expansion Plans
6 Region Analysis
6.1 North America Market: Players, Segments, Downstream and Major Customers
6.1.1 North America Fluorocarbon Gases Sales by Company
6.1.1.1 North America Fluorocarbon Gases Sales by Company (2020-2025)
6.1.1.2 North America Fluorocarbon Gases Revenue by Company (2020-2025)
6.1.2 North America Fluorocarbon Gases Sales Breakdown by Type (2020-2025)
6.1.3 North America Fluorocarbon Gases Sales Breakdown by Application (2020-2025)
6.1.4 North America Fluorocarbon Gases Major Customer
6.1.5 North America Market Trend and Opportunities
6.2 Europe Market: Players, Segments, Downstream and Major Customers
6.2.1 Europe Fluorocarbon Gases Sales by Company
6.2.1.1 Europe Fluorocarbon Gases Sales by Company (2020-2025)
6.2.1.2 Europe Fluorocarbon Gases Revenue by Company (2020-2025)
6.2.2 Europe Fluorocarbon Gases Sales Breakdown by Type (2020-2025)
6.2.3 Europe Fluorocarbon Gases Sales Breakdown by Application (2020-2025)
6.2.4 Europe Fluorocarbon Gases Major Customer
6.2.5 Europe Market Trend and Opportunities
6.3 China Market: Players, Segments, Downstream and Major Customers
6.3.1 China Fluorocarbon Gases Sales by Company
6.3.1.1 China Fluorocarbon Gases Sales by Company (2020-2025)
6.3.1.2 China Fluorocarbon Gases Revenue by Company (2020-2025)
6.3.2 China Fluorocarbon Gases Sales Breakdown by Type (2020-2025)
6.3.3 China Fluorocarbon Gases Sales Breakdown by Application (2020-2025)
6.3.4 China Fluorocarbon Gases Major Customer
6.3.5 China Market Trend and Opportunities
6.4 Japan Market: Players, Segments, Downstream and Major Customers
6.4.1 Japan Fluorocarbon Gases Sales by Company
6.4.1.1 Japan Fluorocarbon Gases Sales by Company (2020-2025)
6.4.1.2 Japan Fluorocarbon Gases Revenue by Company (2020-2025)
6.4.2 Japan Fluorocarbon Gases Sales Breakdown by Type (2020-2025)
6.4.3 Japan Fluorocarbon Gases Sales Breakdown by Application (2020-2025)
6.4.4 Japan Fluorocarbon Gases Major Customer
6.4.5 Japan Market Trend and Opportunities
6.5 South Korea Market: Players, Segments, Downstream and Major Customers
6.5.1 South Korea Fluorocarbon Gases Sales by Company
6.5.1.1 South Korea Fluorocarbon Gases Sales by Company (2020-2025)
6.5.1.2 South Korea Fluorocarbon Gases Revenue by Company (2020-2025)
6.5.2 South Korea Fluorocarbon Gases Sales Breakdown by Type (2020-2025)
6.5.3 South Korea Fluorocarbon Gases Sales Breakdown by Application (2020-2025)
6.5.4 South Korea Fluorocarbon Gases Major Customer
6.5.5 South Korea Market Trend and Opportunities
7 Company Profiles and Key Figures
7.1 Linde Gas
7.1.1 Linde Gas Company Information
7.1.2 Linde Gas Business Overview
7.1.3 Linde Gas Fluorocarbon Gases Sales, Revenue and Gross Margin (2020-2025)
7.1.4 Linde Gas Fluorocarbon Gases Products Offered
7.1.5 Linde Gas Recent Development
7.2 Resonac
7.2.1 Resonac Company Information
7.2.2 Resonac Business Overview
7.2.3 Resonac Fluorocarbon Gases Sales, Revenue and Gross Margin (2020-2025)
7.2.4 Resonac Fluorocarbon Gases Products Offered
7.2.5 Resonac Recent Development
7.3 Taiyo Nippon Sanso
7.3.1 Taiyo Nippon Sanso Company Information
7.3.2 Taiyo Nippon Sanso Business Overview
7.3.3 Taiyo Nippon Sanso Fluorocarbon Gases Sales, Revenue and Gross Margin (2020-2025)
7.3.4 Taiyo Nippon Sanso Fluorocarbon Gases Products Offered
7.3.5 Taiyo Nippon Sanso Recent Development
7.4 Air Liquide
7.4.1 Air Liquide Company Information
7.4.2 Air Liquide Business Overview
7.4.3 Air Liquide Fluorocarbon Gases Sales, Revenue and Gross Margin (2020-2025)
7.4.4 Air Liquide Fluorocarbon Gases Products Offered
7.4.5 Air Liquide Recent Development
7.5 Kanto Denka Kogyo
7.5.1 Kanto Denka Kogyo Company Information
7.5.2 Kanto Denka Kogyo Business Overview
7.5.3 Kanto Denka Kogyo Fluorocarbon Gases Sales, Revenue and Gross Margin (2020-2025)
7.5.4 Kanto Denka Kogyo Fluorocarbon Gases Products Offered
7.5.5 Kanto Denka Kogyo Recent Development
7.6 Merck
7.6.1 Merck Company Information
7.6.2 Merck Business Overview
7.6.3 Merck Fluorocarbon Gases Sales, Revenue and Gross Margin (2020-2025)
7.6.4 Merck Fluorocarbon Gases Products Offered
7.6.5 Merck Recent Development
7.7 Foosung Co., Ltd.
7.7.1 Foosung Co., Ltd. Company Information
7.7.2 Foosung Co., Ltd. Business Overview
7.7.3 Foosung Co., Ltd. Fluorocarbon Gases Sales, Revenue and Gross Margin (2020-2025)
7.7.4 Foosung Co., Ltd. Fluorocarbon Gases Products Offered
7.7.5 Foosung Co., Ltd. Recent Development
7.8 SK Materials
7.8.1 SK Materials Company Information
7.8.2 SK Materials Business Overview
7.8.3 SK Materials Fluorocarbon Gases Sales, Revenue and Gross Margin (2020-2025)
7.8.4 SK Materials Fluorocarbon Gases Products Offered
7.8.5 SK Materials Recent Development
7.9 Solvay
7.9.1 Solvay Company Information
7.9.2 Solvay Business Overview
7.9.3 Solvay Fluorocarbon Gases Sales, Revenue and Gross Margin (2020-2025)
7.9.4 Solvay Fluorocarbon Gases Products Offered
7.9.5 Solvay Recent Development
7.10 Huate Gas
7.10.1 Huate Gas Company Information
7.10.2 Huate Gas Business Overview
7.10.3 Huate Gas Fluorocarbon Gases Sales, Revenue and Gross Margin (2020-2025)
7.10.4 Huate Gas Fluorocarbon Gases Products Offered
7.10.5 Huate Gas Recent Development
7.11 Kemeite (Yoke Technology)
7.11.1 Kemeite (Yoke Technology) Company Information
7.11.2 Kemeite (Yoke Technology) Business Overview
7.11.3 Kemeite (Yoke Technology) Fluorocarbon Gases Sales, Revenue and Gross Margin (2020-2025)
7.11.4 Kemeite (Yoke Technology) Fluorocarbon Gases Products Offered
7.11.5 Kemeite (Yoke Technology) Recent Development
7.12 Haohua Chemical Science & Technology
7.12.1 Haohua Chemical Science & Technology Company Information
7.12.2 Haohua Chemical Science & Technology Business Overview
7.12.3 Haohua Chemical Science & Technology Fluorocarbon Gases Sales, Revenue and Gross Margin (2020-2025)
7.12.4 Haohua Chemical Science & Technology Fluorocarbon Gases Products Offered
7.12.5 Haohua Chemical Science & Technology Recent Development
7.13 Jinhong Gas
7.13.1 Jinhong Gas Company Information
7.13.2 Jinhong Gas Business Overview
7.13.3 Jinhong Gas Fluorocarbon Gases Sales, Revenue and Gross Margin (2020-2025)
7.13.4 Jinhong Gas Fluorocarbon Gases Products Offered
7.13.5 Jinhong Gas Recent Development
7.14 Linggas
7.14.1 Linggas Company Information
7.14.2 Linggas Business Overview
7.14.3 Linggas Fluorocarbon Gases Sales, Revenue and Gross Margin (2020-2025)
7.14.4 Linggas Fluorocarbon Gases Products Offered
7.14.5 Linggas Recent Development
7.15 Juhua Group
7.15.1 Juhua Group Company Information
7.15.2 Juhua Group Business Overview
7.15.3 Juhua Group Fluorocarbon Gases Sales, Revenue and Gross Margin (2020-2025)
7.15.4 Juhua Group Fluorocarbon Gases Products Offered
7.15.5 Juhua Group Recent Development
7.16 PERIC Special Gases
7.16.1 PERIC Special Gases Company Information
7.16.2 PERIC Special Gases Business Overview
7.16.3 PERIC Special Gases Fluorocarbon Gases Sales, Revenue and Gross Margin (2020-2025)
7.16.4 PERIC Special Gases Fluorocarbon Gases Products Offered
7.16.5 PERIC Special Gases Recent Development
7.17 Yongjing Technology
7.17.1 Yongjing Technology Company Information
7.17.2 Yongjing Technology Business Overview
7.17.3 Yongjing Technology Fluorocarbon Gases Sales, Revenue and Gross Margin (2020-2025)
7.17.4 Yongjing Technology Fluorocarbon Gases Products Offered
7.17.5 Yongjing Technology Recent Development
7.18 GrandiT Co., Ltd.
7.18.1 GrandiT Co., Ltd. Company Information
7.18.2 GrandiT Co., Ltd. Business Overview
7.18.3 GrandiT Co., Ltd. Fluorocarbon Gases Sales, Revenue and Gross Margin (2020-2025)
7.18.4 GrandiT Co., Ltd. Fluorocarbon Gases Products Offered
7.18.5 GrandiT Co., Ltd. Recent Development
8 Fluorocarbon Gases Manufacturing Cost Analysis
8.1 Fluorocarbon Gases Key Raw Materials Analysis
8.1.1 Key Raw Materials
8.1.2 Key Suppliers of Raw Materials
8.2 Proportion of Manufacturing Cost Structure
8.3 Manufacturing Process Analysis of Fluorocarbon Gases
8.4 Fluorocarbon Gases Industrial Chain Analysis
9 Marketing Channel, Distributors and Customers
9.1 Marketing Channel
9.2 Fluorocarbon Gases Distributors List
9.3 Fluorocarbon Gases Customers
10 Fluorocarbon Gases Market Dynamics
10.1 Fluorocarbon Gases Industry Trends
10.2 Fluorocarbon Gases Market Drivers
10.3 Fluorocarbon Gases Market Challenges
10.4 Fluorocarbon Gases Market Restraints
11 Research Findings and Conclusion
12 Appendix
12.1 Research Methodology
12.1.1 Methodology/Research Approach
12.1.1.1 Research Programs/Design
12.1.1.2 Market Size Estimation
12.1.1.3 Market Breakdown and Data Triangulation
12.1.2 Data Source
12.1.2.1 Secondary Sources
12.1.2.2 Primary Sources
12.2 Author Details
12.3 Disclaimer
TABLE OF FIGURES
List of Tables
List of Figures
KEY QUESTIONS ADDRESSED BY THE REPORT
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Published: 2024-01-17
Pages: 123
Fluorocarbons, sometimes referred to as perfluorocarbons or PFCs, are organofluorine compounds with the formula CxFy, i.e., they contain only carbon and fluorine. Compounds with the prefix perfluoro- are hydrocarbons, including those with heteroatoms, wherein all C-H bonds have been replaced by C-F bonds.Electronics Manufacturing industries that use fluorocarbon gases for etching and chamber cleaning include liquid crystal displays (LCDs), photovoltaic cells (PV), and semiconductors (including light-emitting diodes). A range of gases are used in two important steps of electronics manufacturing:Plasma etching silicon containing materials and cleaning chemical vapour deposition (CVD) tool chamber-walls where silicon has deposited.The use of fluorocarbon gases in these processes is crucial to the production of devices, as there are no effective substitutes that can be utilized.
Published: 2024-01-07
Pages: 130
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