Ozonized Water Generator Research Report: the global market size is projected to reach USD 0.1 billion by 2031

According to the new market research report “Ozonized Water Generator - Global Market Share and Ranking, Overall Sales and Demand Forecast 2025-2031”, published by QYResearch, the global Ozonized Water Generator market size is projected to reach USD 0.1 billion by 2031, at a CAGR of 5.0% during the forecast period.

Ozone is used in the semiconductor industry for disinfection, reduction of total organic carbon (TOC) in rinsing water, wafer cleaning and Si02 formation. The sterilization ability of ozone due to its strong oxidizing power and the disruption of the bacteria’s membrane permeability is well known and has been used for the sterilization of drinking water for many years. In the semiconductor industry, the sterilization ability is used for the disinfection of process water to reduce the formation of contaminants on tubes and for the disinfection of rinsing water to prevent defects on the wafer.

This report studies the ozone-added ultrapure water production device (Ozonized Water Generator), which is mainly used in semiconductors, flat panel displays and other fields.

Figure. Global Ozonized Water Generator Market Size (US$ Million), 2019-2031

Source: QYResearch, "Ozonized Water Generator - Global Market Share and Ranking, Overall Sales and Demand Forecast 2025-2031”

Figure. Global Ozonized Water Generator Top 10 Players Ranking and Market Share (Ranking is based on the revenue of 2024, continually updated)

Source: QYResearch, "Ozonized Water Generator - Global Market Share and Ranking, Overall Sales and Demand Forecast 2025-2031”
According to QYResearch Top Players Research Center, the global key manufacturers of Ozonized Water Generator include Suzhou Jingtuo Semiconductor Technology, Sumitomo Precision Products, Ebara, MKS Instruments, Meidensha Corporation, etc. In 2024, the global top four players had a share approximately 68.0% in terms of revenue.




Market Drivers
As semiconductor nodes shrink and display technologies advance, manufacturers require non-contaminating, eco-friendly, and highly effective cleaning solutions. Ozonized water, with its strong oxidative properties and no chemical residue, offers an ideal solution. This is a major driver, especially as fabs move toward sub-5nm nodes and high-density FPD production.
Next-gen chip packaging technologies like 3D stacking and wafer-level packaging demand ultra-precise surface cleaning. Ozonized water systems support these processes by removing organic layers and particles without damaging sensitive features.
Newer systems offer better control over ozone concentration, temperature, and flow rate, with real-time monitoring, making them more reliable and easier to integrate into automated manufacturing lines.
Market Restraints:
Ozonized water generators, especially those used in semiconductor and flat panel display manufacturing, require advanced materials, precision engineering, and complex integration into cleanroom environments. This results in significant capital expenditure (CapEx) and high maintenance costs.
These systems need precise control over ozone concentration, flow rate, temperature, and purity. Integrating them into existing production lines requires custom engineering, training, and compatibility checks with ultrapure water (UPW) systems. This technical complexity can slow adoption in facilities lacking engineering expertise.
Ozone is a toxic and reactive gas, requiring stringent safety protocols, leak detection, and ventilation systems. Facilities must comply with occupational exposure limits, adding to infrastructure and compliance costs.
In conclusion, the Ozonized Water Generator is poised to play an increasingly critical role in semiconductor manufacturing. With continuous technological advancement and the growing participation of competitive Chinese suppliers, the market is becoming more dynamic and accessible. As the semiconductor industry evolves, the demand for clean, efficient, and precise cleaning processes will only intensify—positioning the Ozonized Water Generator as a key enabling technology for the next generation of semiconductor production.



About The Authors
Liang Hui – New Energy Analyst
lianghui@qyresearch.com

Long-term focus on the new energy field, long-term observation, tracking and research on various links of the industrial chain such as semiconductors, consumer electronics, hydrogen energy equipment, photovoltaics, etc., with rich industry research experience.
Leading projects include explosion-proof valves for energy storage and automotive power batteries, hydrogen burners, hydrogen station chillers, etc.



About QYResearch
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